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[For Precision Measurement] 44mm Square Compact Piezo Stage P-611.Z

A 44mm square casing that achieves height measurement at the nanometer level.

In the field of precision measurement, accurate height measurement is essential. Particularly in the measurement of fine structures and the precise profiling of surface shapes, nanometer-level accuracy is required. Conventional measurement methods are susceptible to the effects of vibrations and temperature changes, making accurate measurements difficult. The P-611.Z achieves a maximum resolution of 0.2nm and 0.1% linearity, addressing challenges in height measurement. 【Application Scenarios】 - Height measurement of semiconductor devices - Shape measurement of MEMS devices - Thickness measurement of optical components - Surface roughness measurement 【Benefits of Implementation】 - Enables height measurement at the nanometer level - Reduces measurement time - Improves measurement accuracy - Enhances product quality

  • P-611.ZS.jpg
  • P-611.Z.jpg
  • Actuator
  • Piezoelectric Devices
  • encoder
  • Small Piezo Stage

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